Surface Acoustic Wave Devices on Silicon Substrate using Patterned and Thin film ZnO
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Surface acoustic wave (SAW) is a type of wave that propagates on the surface of an elastic material. The concentration of energy of these waves is higher at the surface and decreases exponentially along the depth of the material. In general SAW devices are realized on polished piezoelectric substrates in conjunction with metallic interdigital transducer (IDT) for the transduction of electric energy to acoustic energy and vice versa. Various types of surface waves like Rayleigh wave, shear horizontal wave, Bleustein-Gulyaev-Shimizu (BGS) wave, and Love wave are generated by choosing appropriate crystal cut of the piezoelectric substrate and guiding layers. Electric field generated by the IDT produces strain in the piezoelectric substrate and vice versa. Applying alternating voltage to the IDT results in the generation of SAW in the substrate. The operating frequency of a SAW device depends on the dimensions of IDT structure and acoustic velocity in the substrate.
Supervisor: Harshal B. Nemade
ELECTRONICS AND ELECTRICAL ENGINEERING